Research Article 2026-04-21 under-review v1

On-chip ultracompact broadband reflector and high-Q Fabry-Pérot cavity based on inverse design

L
Liangchen Si Nanjing University
H
Haoran Qin Nanjing University
C
Chunyu Huang Nanjing University
Y
Yanqing Lu Nanjing University
J
Junlong Kou Nanjing University

Abstract

Photonic integrated circuits (PICs) are rapidly evolving toward extreme miniaturization, multi-wavelength operation, and multifunctional integration. Driven by breakthroughs in GPU-accelerated computation and topology optimization, inverse design has emerged as a powerful paradigm that overcomes the limitations of conventional geometry-driven approaches, resolving longstanding performance bottlenecks. In this work, we demonstrate an on-chip ultracompact broadband Fabry-Pérot (F-P) cavity enabled by inverse-designed reflectors, fabricated on a standard 220-nm silicon-on-insulator (SOI) platform. The reflector occupies a footprint of merely 2 µm × 2 µm and achieves an average reflectivity of ~ 0.97 across the 1500–1600 nm telecom window, enabling a high-loaded quality factor F-P resonator. Our inverse design strategy successfully reconciles the traditionally opposing demands of device miniaturization and broadband operation, while simultaneously demonstrating excellent robustness against nanofabrication tolerances. These results provide a scalable pathway toward high-density integration of advanced functionalities, including narrowband filtering, on-chip spectrometry, and engineered quantum light sources, within next-generation silicon photonic systems.

Citation Information

@article{liangchensi2026,
  title={On-chip ultracompact broadband reflector and high-Q Fabry-Pérot cavity based on inverse design},
  author={Liangchen Si and Haoran Qin and Chunyu Huang and Yanqing Lu and Junlong Kou},
  journal={PhotoniX Synergy},
  year={2026},
  doi={https://doi.org/10.21203/rs.3.rs-9282085/v1}
}
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